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Hydrogen Ion Implanter Series

iStellar-80H

High-current hydrogen ion implanters built on the fundamental architecture of our high-current ion implanters validated through mass production on mainstream FAB production lines; equipped with our proprietary high-current hydrogen ion source; featuring high reliability, high productivity, and other superior characteristics

 

iStellar-500H

Medium-to-high-energy hydrogen ion implantersbuilt on the fundamental architecture of our iStellar-HE2000 validated through mass production on mainstream FAB production lines; equipped with our proprietary hydrogen-dedicated ion source; featuring strong stability, high productivity, and other superior characteristics

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Hydrogen Ion Implanter Series

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